The following procedure is adapted from a TRS Tech Article "Cleaning the MAF":
1. Remove the negative cable from the battery;
2. Unplug the wiring harness clip from the MAF;
3. Remove the two security star-head screws and carefully remove the sensor. You will need a security star (size T15 or T20) torx bit (or see below);
4. Take note of the two sensor filaments, they look almost like the filaments in a light bulb. Carefully spray the filaments with an O2 safe cleaner, and if available, a few careful blasts of compressed air.
5. While it is drying carefully wipe the aluminum mount surface of the MAF body if there is any dust there, but be careful not to get dust in the mount hole.
6. When the sensor is dry, re-install the sensor back in the MAF body and connect the MAF wiring harness clip. Reconnect the negative battery cable.
This what the MAF sensor looks like when you take it out (note the two filaments which you must be VERY careful with when cleaning):
As for those stupid "security star" torx screws, I took a Dremel tool and cut a slit through the head of the bolts so I could remove them with a regular screwdriver. Then I replaced the torx screws with similar-sized phillips heads screws and small lock washers. Now whenever I want access to the MAF I don't have to mess around with security star bits or anything else. I just pull out a screwdriver from my toolbox.