Carb cleaner is fine, anything that loosens the carbon build up, but keep it out of the vacuum chamber.
And test it when cleaned and dried out.
One other thing, any time you change or clean something on the engine and especially if there was a code and/or CEL(check engine light), you need to reset the computer, clear the CEL.
Scanner can do that, or unhooking the battery for 5 minutes.
What this does is reset the computer so it will "relearn" the settings for any new or cleaned parts.
It is also a helpful tool if engine is cold for the restart.
Only a few sensors and controls are used until engine warms up, so if you time how long it takes before CEL comes back on you can narrow down where a problem might be.
EGR system, for example, is only used when engine is under load, valve is closed most of the time.
Ford Brand DPFE sensor is an exception, it does wear out, but most sensors and controls last the life of the vehicle.
Sensors are the "messengers", and the old saying "don't shoot the messenger" applies.
Codes are generally a mechanical issue warning, the working sensor detected the problem, so.............don't shoot the messenger, lol.
And there are specific codes for a bad sensor, computer tests sensors all the time, a sanity check, if sensor fails a code will come up for that failure.
It isn't a fool proof system, because God always makes a better fool, but it does work pretty well for what it is.